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Services for I. Richard Wayne, 66, a former Chicago electrical engineer and pioneer in microwave technology, have been held in Frnklin, N.Y. He died May 10 in Ridgefield, Conn., his home for the last several years. Mr. Wayne, who spent most of his life in Chicago, worked here for Westinghouse Electric Corp. and Reeve Electronics. Since leaving Chicago in 1970 he had worked for Cober Electronics, Stamford, Conn. He held several patents in the microwave field. Mr. Wayne served in the Navy during World War II, earning two Bronze Stars for bravery. He is survived by his wife, Dolores; two daughters, Karen Winterburn and Janet Hook Bridge; a son, Alexei; six grandchildren; and two sisters.